Assignment of Assignor's Interest

Recorded: 2003-01-15 Received: 2003-01-23 Pages: 2

Assignors

KISTLER, RODNEY

Executed: 2003-01-13

OWCZARZ, ALEKSANDER

Executed: 2003-01-13

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES

Covered Properties (2)

Chemical Mechanical Planarization (Cmp) Apparatus

Application: 10/345,694 →

Megasonic Cleaning System with Buffered Cavitation Method

Application: 10/341,425 →