IP Library Assignment 013679/0217
Patent Assignment
Reel/Frame 013679/0217

ASSIGNMENT OF ASSIGNOR'S INTEREST

Recorded: 2003-05-22 Received: 2003-05-22 Pages: 4
Assignors
BECKNELL, ALAN FREDERICK
Executed: 2003-05-22
BUCKLEY, THOMAS JAMES
Executed: 2003-05-22
FERRIS, DAVID
Executed: 2003-05-22
PINGREE, JR., RICHARD E.
Executed: 2003-05-22
SAKTHIVEL, PALANIKUMARAN
Executed: 2003-05-22
SRIVASTAVA, ASEEM KUMAR
Executed: 2003-05-22
WALDFRIED, CARLO
Executed: 2003-05-22
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MA, 01915, UNITED STATES
Covered Applications (2)
PLASMA APPARATUS, GAS DISTRIBUTION ASSEMBLY FOR A PLASMA APPARATUS AND PROCESSES THEREWITH
App. No. 10/249,962
SYNTHESIS OF [2H1, 13C], [2H2, 13C] AND [2H3, 13C]METHYL ARYL SULFIDES
App. No. 10/342,577