IP Library › Granted Patent US 8,580,076

Granted Patent Utility

US 8,580,076 · Confirmation No. 2615

PLASMA APPARATUS, GAS DISTRIBUTION ASSEMBLY FOR A PLASMA APPARATUS AND PROCESSES THEREWITH

Inventors: Alan Frederick Becknell, Thomas James Buckley, David Ferris, Richard E. Pingree JR., Palanikumaran Sakthivel, Aseem Kumar Srivastava, Carlo Waldfried

Patented Case View Patent ↗ View Publication ↗

	Code	Description	Pages	PDF
2014-04-22	`COCOUT`	Certificate of Correction - Post Issue Communication	1	View
2014-02-18	`COCIN`	Request for Certificate of Correction	2	View
2014-02-18	`WFEE`	Fee Worksheet (SB06)	2	View
2014-02-18	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2013-10-23	`ISSUE.NTF`	Issue Notification	1	View
2013-10-08	`IFEE`	Issue Fee Payment (PTO-85B)	2	View
2013-10-08	`WFEE`	Fee Worksheet (SB06)	2	View
2013-10-08	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2013-07-10	`NOA`	Notice of Allowance and Fees Due (PTOL-85)	8	View
2013-07-10	`892`	List of references cited by examiner	1	View
2013-07-10	`SRNT`	Examiner's search strategy and results	5	View
2013-07-10	`SRFW`	Search information including classification, databases and other search related notes	1	View
2013-07-10	`IIFW`	Issue Information including classification, examiner, name, claim, renumbering, etc.	3	View
2013-07-10	`1449`	List of References cited by applicant and considered by examiner	2	View
2013-04-30	`APDR`	Patent Board Decision - Examiner Reversed	10	View
2013-01-30	`N570`	Communication - Re: Power of Attorney (PTOL-308)	1	View
2013-01-22	`PA..`	Power of Attorney	1	View
2013-01-22	`R3.73`	Assignee showing of ownership per 37 CFR 3.73	1	View
2013-01-22	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2011-01-13	`AP_DK_M`	Appeal Docketing Notice	2	View
2011-01-07	`RBNE`	Reply Brief Noted - Patent Board	2	View
2011-01-07	`RBNE`	Reply Brief Noted - Patent Board	6	View
2011-01-07	`1449`	List of References cited by applicant and considered by examiner	2	View
2010-10-20	`APRB`	Reply Brief Filed	14	View
2010-10-20	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2010-09-23	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	2	View
2010-09-23	`TRAN.LET`	Transmittal Letter	2	View
2010-09-23	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2010-08-20	`APEA`	Examiner's Answer to Appeal Brief	67	View
2010-08-20	`892`	List of references cited by examiner	1	View
2009-12-02	`AP.B`	Appeal Brief Filed	47	View
2009-12-02	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2009-11-12	`CTMS`	Miscellaneous Action with shortened statutory period (SSP)	2	View
2009-10-19	`AP.B`	Appeal Brief Filed	47	View
2009-10-19	`WFEE`	Fee Worksheet (SB06)	2	View
2009-10-19	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2009-08-18	`N/AP`	Notice of Appeal Filed	1	View
2009-08-18	`XT/`	Extension of Time	1	View
2009-08-18	`WFEE`	Fee Worksheet (SB06)	2	View
2009-08-18	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2009-02-23	`CTNF`	Non-Final Rejection	35	View
2009-02-23	`892`	List of references cited by examiner	1	View
2009-02-23	`SRFW`	Search information including classification, databases and other search related notes	1	View
2009-02-23	`1449`	List of References cited by applicant and considered by examiner	2	View
2009-02-23	`SRNT`	Examiner's search strategy and results	4	View
2008-12-08	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	2	View
2008-12-08	`TRAN.LET`	Transmittal Letter	2	View
2008-12-08	`FOR`	Foreign Reference	9	View
2008-12-08	`AMSB`	Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE)	1	View
2008-12-08	`CLM`	Claims	9	View
2008-12-08	`REM`	Applicant Arguments/Remarks Made in an Amendment	8	View
2008-12-08	`WFEE`	Fee Worksheet (SB06)	2	View
2008-12-08	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2008-12-08	`RCEX`	Request for Continued Examination (RCE)	3	View
2008-12-08	`WFEE`	Fee Worksheet (SB06)	1	View
2008-07-10	`APEA`	Examiner's Answer to Appeal Brief	50	View
2008-04-25	`AP.B`	Appeal Brief Filed	3	View
2008-04-25	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2008-03-26	`APBD`	Notice - Defective Appeal Brief	2	View
2008-01-14	`SAPB`	Supplemental Appeal Brief	14	View
2008-01-14	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2008-01-14	`LET.`	Miscellaneous Incoming Letter	2	View
2007-12-17	`CTMS`	Miscellaneous Action with shortened statutory period (SSP)	2	View
2007-12-06	`LET.`	Miscellaneous Incoming Letter	2	View
2007-12-06	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2007-12-06	`AP.B`	Appeal Brief Filed	31	View
2007-11-13	`CTMS`	Miscellaneous Action with shortened statutory period (SSP)	2	View
2007-11-05	`WFEE`	Fee Worksheet (SB06)	2	View
2007-11-05	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2007-11-05	`AP.B`	Appeal Brief Filed	31	View
2007-09-05	`WFEE`	Fee Worksheet (SB06)	2	View
2007-09-05	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2007-09-05	`N/AP`	Notice of Appeal Filed	1	View
2007-06-06	`CTFR`	Final Rejection	30	View
2007-03-27	`A...`	Amendment/Request for Reconsideration-After Non-Final Rejection	3	View
2007-03-27	`CLM`	Claims	9	View
2007-03-27	`REM`	Applicant Arguments/Remarks Made in an Amendment	18	View
2007-03-27	`WFEE`	Fee Worksheet (SB06)	1	View
2007-03-01	`CTMS`	Miscellaneous Action with shortened statutory period (SSP)	3	View
2006-12-20	`A.I.`	Informal or Non-Responsive Amendment	3	View
2006-12-20	`CLM.NE`	Claim-Amendment Not Entered	9	View
2006-12-20	`REM`	Applicant Arguments/Remarks Made in an Amendment	17	View
2006-12-20	`WFEE`	Fee Worksheet (SB06)	1	View
2006-09-25	`CTNF`	Non-Final Rejection	24	View
2006-09-25	`892`	List of references cited by examiner	1	View
2006-09-25	`FOR`	Foreign Reference	10	View
2006-09-25	`BIB`	Bibliographic Data Sheet	1	View
2006-09-25	`SRFW`	Search information including classification, databases and other search related notes	1	View
2006-09-18	`SRNT`	Examiner's search strategy and results	7	View
2006-07-13	`RCEX`	Request for Continued Examination (RCE)	1	View
2006-07-13	`WFEE`	Fee Worksheet (SB06)	1	View
2006-07-13	`ANE.I`	Amendment After Final or under 37CFR 1.312, initialed by the examiner.	1	View
2006-07-13	`WFEE`	Fee Worksheet (SB06)	1	View
2006-07-07	`CTAV`	Advisory Action (PTOL-303)	3	View
2006-07-07	`BIB`	Bibliographic Data Sheet	1	View
2006-06-20	`AMSB`	Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE)	3	View
2006-06-20	`CLM`	Claims	11	View
2006-06-20	`REM`	Applicant Arguments/Remarks Made in an Amendment	14	View
2006-06-20	`WFEE`	Fee Worksheet (SB06)	1	View
2006-04-20	`CTFR`	Final Rejection	25	View
2006-04-20	`892`	List of references cited by examiner	1	View
2006-02-02	`A...`	Amendment/Request for Reconsideration-After Non-Final Rejection	1	View
2006-02-02	`SPEC`	Specification	2	View
2006-02-02	`CLM`	Claims	11	View
2006-02-02	`REM`	Applicant Arguments/Remarks Made in an Amendment	12	View
2006-02-02	`XT/`	Extension of Time	2	View
2006-02-02	`TRAN.LET`	Transmittal Letter	1	View
2006-02-02	`WFEE`	Fee Worksheet (SB06)	1	View
2005-10-03	`CTNF`	Non-Final Rejection	18	View
2005-10-03	`1449`	List of References cited by applicant and considered by examiner	3	View
2005-10-03	`892`	List of references cited by examiner	2	View
2005-10-03	`SRFW`	Search information including classification, databases and other search related notes	1	View
2005-10-03	`BIB`	Bibliographic Data Sheet	2	View
2005-09-29	`SRNT`	Examiner's search strategy and results	4	View
2005-07-15	`ELC.`	Response to Election / Restriction Filed	2	View
2005-07-15	`REM`	Applicant Arguments/Remarks Made in an Amendment	2	View
2005-07-15	`WFEE`	Fee Worksheet (SB06)	1	View
2005-06-15	`CTRS`	Requirement for Restriction/Election	6	View
2004-08-13	`A.PE`	Preliminary Amendment	2	View
2004-08-13	`SPEC`	Specification	2	View
2004-08-13	`REM`	Applicant Arguments/Remarks Made in an Amendment	1	View
2003-07-17	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	5	View
2003-07-17	`FOR`	Foreign Reference	24	View
2003-07-17	`FOR`	Foreign Reference	27	View
2003-05-22	`TRNA`	Transmittal of New Application	6	View
2003-05-22	`ADS`	Application Data Sheet	5	View
2003-05-22	`SPEC`	Specification	49	View
2003-05-22	`CLM`	Claims	21	View
2003-05-22	`ABST`	Abstract	1	View
2003-05-22	`DRW`	Drawings-only black and white line drawings	9	View
2003-05-22	`OATH`	Oath or Declaration filed	5	View
2003-05-22	`136A`	Authorization for Extension of Time all replies	6	View
2003-05-22	`WFEE`	Fee Worksheet (SB06)	1	View
2003-05-22	`WFEE`	Fee Worksheet (SB06)	1	View
2003-05-22	`SPEC`	Specification	37	View
2003-05-22	`CLM`	Claims	16	View
2003-05-22	`ABST`	Abstract	1	View
2003-05-22	`DRW`	Drawings-only black and white line drawings	9	View

Inventors

Alan Frederick Becknell Ellicott City, MD

Thomas James Buckley Ijamsville, MD

David Ferris Rockville, MD

Richard E. Pingree JR. New Market, MD

Palanikumaran Sakthivel Gaithersburg, MD

Aseem Kumar Srivastava Germantown, MD

Carlo Waldfried Falls Church, VA

Attorneys & Agents of Record

DAVID TUCKER Reg. 63120 Attorney · HARNESS, DICKEY & PIERCE, P.L.C.

EUGENE CHIU Reg. 63685 Attorney · LATHAM & WATKINS LLP

CLAIRE GREEN Reg. 75290 Attorney

SI CHEN Reg. 80259 Attorney · LAM RESEARCH CORPORATION

JEFFREY CHAPP Reg. 50579 Attorney · HARNESS, DICKEY & PIERCE, P.L.C.

MISOOK KIM Reg. 74709 Attorney · FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER, LL

JAEWON LEE Reg. 80689 Attorney · LAM RESEARCH CORPORATION

HORACE NG Reg. 39315 Attorney · LAM RESEARCH CORPORATION

HALEY MCCLORY Reg. 78627 Attorney · IBM

VIGNESH RAMACHANDRAN Reg. 77203 Agent

AHMAD KHOSHNEVIS Reg. 81153 Attorney · COMPASS IP LAW PC

SRIVIDYA REVURU Reg. 66830 Agent · HESLIN ROTHENBERG FARLEY & MESITI P.C.

CLARENCE FRANKLIN Reg. 73046 Attorney · HARNESS, DICKEY & PIERCE, LLP

MICHAEL WIGGINS Reg. 34754 Attorney · HARNESS, DICKEY & PIERCE, P.L.C.

NICHOLAS DRYSDALE Reg. 64840 Attorney · HARNESS, DICKEY & PIERCE, P.L.C.

HEMANT KESKAR Reg. 61776 Attorney · HARNESS, DICKEY & PIERCE, P.L.C.

XIAO LIN Reg. 75444 Agent · FENWICK & WEST

DARRELL HENDERSON Reg. 77045 Attorney · LAM RESEARCH CORPORATION

CHRISTINE UMBRIGHT Reg. 75428 Attorney · LAM RESEARCH CORPORATION

NISHAT HASAN Reg. 61694 Attorney · LAM RESEARCH CORPORATION

FRANCESCO MANGINI Reg. 79547 Agent · WEAVER AUSTIN VILLENEUVE & SAMPSON, LLP

XIAOYU CHEN Reg. 800084 Agent · KNOBBE, MARTENS, OLSON & BEAR

Classification

USPC 156/345.35

H01J37/32 H01J37/32357 H01J37/3244 H01J37/32844 Y02C20/30

Prosecution

Examiner: LUND, JEFFRIE ROBERT
Art Unit: 1716
Customer No.: 91286
Docket No.: 15545-000118
Confirmation No.: 2615

Publication

Pub. No.: US20040238123A1
Pub. Date: 2004-12-02

Patent Term Adjustment

-214days

AXCELIS TECHNOLOGIES, INC.

from SILICON VALLEY BANK

TERMINATION OF SECURITY AGREEMENT Recorded 2013-04-16

030302/0719 →

LAM RESEARCH CORPORATION

from AXCELIS TECHNOLOGIES, INC.

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2012-12-21

029529/0757 →

SILICON VALLEY BANK

from AXCELIS TECHNOLOGIES, INC.

SECURITY AGREEMENT Recorded 2008-05-09

020986/0143 →

AXCELIS TECHNOLOGIES, INC.

from BECKNELL, ALAN FREDERICK, BUCKLEY, THOMAS JAMES, FERRIS, DAVID, PINGREE, JR., RICHARD E., SAKTHIVEL, PALANIKUMARAN, SRIVASTAVA, ASEEM KUMAR, WALDFRIED, CARLO

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2003-05-22

013679/0217 →

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Quick Facts

Patent No.: US 8,580,076
App. No.: 10/249,962
Filed: 2003-05-22
Granted: 2013-11-12
Pub. No.: US20040238123A1
Examiner: LUND, JEFFRIE ROBERT
Art Unit: 1716
PTA: -214 days

External Links

USPTO Patent Center↗ Full Patent PDF↗ Pre-Grant Publication PDF↗