Patent Assignment
Reel/Frame 013679/0818
Assignment of Assignor's Interest
Recorded: 2003-01-15
Pages: 3
Assignee
KLA-TENCOR TECHNOLOGIES, CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Apparatus and Methods for Removing Optical Abberations During an Optical Inspection