Patent Assignment
Reel/Frame 013680/0318
Assignment of Assignor's Interest
Recorded: 2003-05-23
Pages: 16
Assignors
LIU, FENG Q.
Executed: 2003-05-09
TSAI, STAN D.
Executed: 2003-05-12
HU, YONGQI
Executed: 2003-05-09
NEO, SIEW S.
Executed: 2003-05-09
WANG, YAN
Executed: 2003-05-09
DUBOUST, ALAIN
Executed: 2003-05-12
CHEN, LIANG-YU
Executed: 2003-05-08
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, M/S 32061, PATENT DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method and Composition for Polishing a Substrate