Patent Assignment
Reel/Frame 013707/0008
Assignment of Assignor's Interest
Recorded: 2003-01-23
Pages: 5
Assignors
HERBST, TIM W.
Executed: 2003-01-06
MACIEJ, TODD K.
Executed: 2003-01-06
GAST, TRACY A.
Executed: 2003-01-13
WAGENER, THOMAS J.
Executed: 2003-01-09
SIEFERING, KEVIN L.
Executed: 2003-01-13
Assignee
FSI INTERNATIONAL INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Edge Gripping Device for Handling a Set of Semiconductor Wafers in an Immersion Processing System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.