Patent Assignment
Reel/Frame 031910/0689
Merger, Change of Name
Recorded: 2014-01-02
Pages: 7
Assignee
TEL FSI, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Properties
(25)
Method for transferring a microelectronic device to and from a processing chamber
Patent:
6,251,195 →
Application:
09/351,939 →
Coating Methods and Apparatus for Coating
Patent:
7,404,681 →
Application:
09/583,629 →
Nozzle Design for Generating Fluid Streams Useful in the Manufacture of Microelectronic Devices
High Flow High Control Valve and Assembly
Transition Flow Treatment Process and Apparatus
Method for Etching High-K Films in Solutions Comprising Dilute Fluoride Species
Control of Robotic Systems
Semiconductor Wafer Cleaning Systems and Methods
Edge Gripping Device for Handling a Set of Semiconductor Wafers in an Immersion Processing System
Systems and Methods Incorporating an End Effector with a Rotatable and/or Pivotable Body and/or an Optical Sensor Having a Light Path That Extends Along a Length of the End Effector
Microelectronic Device Drying Devices and Techniques
Thermal Process Station with Heated Lid
Rotary Unions, Fluid Delivery Systems, and Related Methods
System and Method for Carrying Out Liquid and Subsequent Drying Treatments on One or More Wafers
Use of Silyating Agents
Controlled Growth of Highly Uniform, Oxide Layers, Especially Ultrathin Layers
Methods for Rinsing Microelectronic Substrates Utilizing Cool Rinse Fluid Within a Gas Enviroment Including a Drying Enhancement Substance
Reagent Activator for Electroless Plating
Process for Removing Material from Substrates
Process for Treatment of Substrates with Water Vapor or Steam
Rinsing Methodologies for Barrier Plate and Venturi Containment Systems in Tools Used to Process Microelectronic Workpieces with One or More Treatment Fluids, and Related Apparatuses
Reagent Activator for Electroless Plating
Substrate Processing Systems and Related Methods
Tools and Methods for Processing Microelectronic Workpieces Using Process Chamber Designs That Easily Transition Between Open and Closed Modes of Operation
Process for Treatment of Semiconductor Wafer Using Water Vapor Containing Environment
Related Assignments
(18)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 17, 2001
From: KUNKEL, PAM; NARAYANSWAMI, NATRAJ; PATRIN, JOHN C.
To: FSI INTERNATIONAL, INC.
Reel/Frame 012173/0573 →
Assignment of Assignor's Interest
Dec 26, 2001
From: VOLOVETS, MICHAEL; BENSON, ARNE
To: FSI INTERNATIONAL, INC.
Reel/Frame 012426/0148 →
Assignment of Assignor's Interest
Jul 9, 2002
From: CHRISTENSON, KURT KARL; LEE, NAM PYO; MICHALKO, GARY WILLIAM; RATHMAN, CHRISTINA ANN
To: FSI INTERNATIONAL, INC.
Reel/Frame 013084/0335 →
Assignment of Assignor's Interest
Sep 10, 2002
From: CHRISTENSON, KURT K.; WAGENER, THOMAS J.; ROSENGREN, NEIL BRUCE; SCHWAB, BRENT D.
To: FSI INTERNATIONAL, INC.
Reel/Frame 013299/0069 →
Assignment of Assignor's Interest
Sep 16, 2002
From: RAMANAN, NATARAJAN
To: FSI INTERNATIONAL
Reel/Frame 013300/0273 →
Assignment of Assignor's Interest
Dec 9, 2002
From: CHRISTENSON, KURT K.; RATHMAN, CHRISTINA A.
To: FSI INTERNATIONAL, INC.
Reel/Frame 013560/0444 →
Assignment of Assignor's Interest
Jan 23, 2003
From: HERBST, TIM W.; MACIEJ, TODD K.; GAST, TRACY A.; WAGENER, THOMAS J.
To: FSI INTERNATIONAL INC.
Reel/Frame 013707/0008 →
Assignment of Assignor's Interest
Aug 4, 2003
From: NGUYEN, VUONG P.; SIMS, RICHARD E.; ZHU, XIAOGUANG
To: FSI INTERNATIONAL, INC.
Reel/Frame 015059/0875 →
Corrective for Assgn Recorded at Reel 013880 Frame 0544
Sep 8, 2003
From: FSI INTERNATIONAL, INC.
To: FSI INTERNATIONAL, INC.
Reel/Frame 015247/0285 →
Assignment of Assignor's Interest
Mar 12, 2004
From: BENSON, ARNE C.; HANZLIK, EDWARD D.
To: FSI INTERNATIONAL, INC.
Reel/Frame 015095/0120 →
Assignment of Assignor's Interest
Oct 4, 2004
From: BENSON, ARNE C.; OLSON, ERIK D.; SPAETH, DOUGLAS S.
To: FSI INTERNATIONAL, INC.
Reel/Frame 015847/0336 →
Assignment of Assignor's Interest
Oct 22, 2004
From: CLARK, PHILIP G.; CHRISTENSON, KURT KARL; SCHWAB, BRENT D.
To: FSI INTERNATIONAL, INC.
Reel/Frame 015910/0537 →
Assignment of Assignor's Interest
Nov 15, 2004
From: WAGENER, THOMAS J.
To: FSI INTERNATIONAL, INC.
Reel/Frame 015983/0741 →
Assignment of Assignor's Interest
Jan 18, 2005
From: GAST, TRACY A.; LOPER, STEPHEN C.; WAGENER, THOMAS J.
To: FSI INTERNATIONAL, INC.
Reel/Frame 016156/0314 →
Assignment of Assignor's Interest
Apr 1, 2005
From: GAST, TRACEY A.
To: FSI INTERNATIONAL, INC.
Reel/Frame 016440/0307 →
Assignment of Assignor's Interest
Dec 13, 2005
From: CHRISTENSON, KURT KARL
To: FSI INTERNATIONAL, INC.
Reel/Frame 017447/0872 →
Corrective Assignment to Correct the Assignees Address Previously Recorded on Reel 017447 Frame 0872
Apr 17, 2006
From: CHRISTENSON, KURT KARL
To: FSI INTERNATIONAL, INC.
Reel/Frame 017791/0092 →
Conversion
Jul 30, 2020
From: TEL FSI, INC.
To: TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
Reel/Frame 053366/0139 →