Patent Assignment
Reel/Frame 013560/0444
Assignment of Assignor's Interest
Recorded: 2002-12-09
Pages: 3
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Semiconductor Wafer Cleaning Systems and Methods
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.