Patent Assignment
Reel/Frame 016156/0314
Assignment of Assignor's Interest
Recorded: 2005-01-18
Pages: 4
Assignors
GAST, TRACY A.
Executed: 2004-11-02
LOPER, STEPHEN C.
Executed: 2004-10-29
WAGENER, THOMAS J.
Executed: 2004-10-29
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Microelectronic Device Drying Devices and Techniques
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.