Patent Assignment
Reel/Frame 015059/0875
Assignment of Assignor's Interest
Recorded: 2003-08-04
Pages: 7
Assignors
NGUYEN, VUONG P.
Executed: 2003-07-14
SIMS, RICHARD E.
Executed: 2003-07-22
ZHU, XIAOGUANG
Executed: 2003-07-18
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318-3052
Covered Property
(1)
Thermal Process Station with Heated Lid
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.