Patent Assignment
Reel/Frame 015247/0285
Corrective for Assgn Recorded at Reel 013880 Frame 0544
Recorded: 2003-09-08
Pages: 4
Assignor
FSI INTERNATIONAL, INC.
Executed: 2002-07-12
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, MS4-8448, CHASKA, MINNESOTA, 55318-3052
Covered Property
(1)
Control of Robotic Systems
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.