Patent Assignment
Reel/Frame 015095/0120
Assignment of Assignor's Interest
Recorded: 2004-03-12
Pages: 3
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318-3052
Covered Property
(1)
Rotary Unions, Fluid Delivery Systems, and Related Methods
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.