Patent Assignment
Reel/Frame 013299/0069
Assignment of Assignor's Interest
Recorded: 2002-09-10
Pages: 4
Assignors
CHRISTENSON, KURT K.
Executed: 2002-08-26
WAGENER, THOMAS J.
Executed: 2002-08-29
ROSENGREN, NEIL BRUCE
Executed: 2002-08-28
SCHWAB, BRENT D.
Executed: 2002-08-26
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Method for Etching High-K Films in Solutions Comprising Dilute Fluoride Species
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.