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App. No. 10/172,795 · Confirmation No. 1079

METHOD FOR ETCHING HIGH-K FILMS IN SOLUTIONS COMPRISING DILUTE FLUORIDE SPECIES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2005-05-26 COCOUT Certificate of Correction - Post Issue Communication 1 View
2005-03-28 COCIN Request for Certificate of Correction 2 View
2004-07-07 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-04-23 NOA Notice of Allowance and Fees Due (PTOL-85) 5 View
2004-04-05 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-05 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-05 FWCLM Index of Claims 1 View
2004-04-05 NOA Notice of Allowance and Fees Due (PTOL-85) 7 View
2004-04-05 1449 List of References cited by applicant and considered by examiner 1 View
2004-03-25 SRNT Examiner's search strategy and results 3 View
2004-02-23 WFEE Fee Worksheet (SB06) 1 View
2004-02-23 FWCLM Index of Claims 1 View
2003-12-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-12-19 CLM Claims 5 View
2003-12-19 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-12-19 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-08-14 CTNF Non-Final Rejection 12 View
2003-07-28 SRNT Examiner's search strategy and results 10 View
2003-07-28 SRNT Examiner's search strategy and results 2 View
2003-07-14 ELC. Response to Election / Restriction Filed 1 View
2003-07-14 CLM Claims 4 View
2003-07-14 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-06-11 CTRS Requirement for Restriction/Election 4 View
2003-06-11 1449 List of References cited by applicant and considered by examiner 1 View
2003-06-11 892 List of references cited by examiner 1 View
2003-01-16 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-09-16 LET. Miscellaneous Incoming Letter 3 View
2002-09-16 OATH Oath or Declaration filed 4 View
2002-07-17 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-06-14 TRNA Transmittal of New Application 1 View
2002-06-14 SPEC Specification 20 View
2002-06-14 CLM Claims 4 View
2002-06-14 ABST Abstract 1 View
2002-06-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-06-14 SRFW Search information including classification, databases and other search related notes 1 View
2002-06-14 FWCLM Index of Claims 1 View
2002-06-14 TRNA Transmittal of New Application 1 View
2002-06-14 SPEC Specification 20 View
2002-06-14 CLM Claims 4 View
2002-06-14 ABST Abstract 1 View
2002-06-14 WFEE Fee Worksheet (SB06) 1 View
2002-06-14 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
App. No.
10/172,795
Filed
2002-06-14
Granted
2004-12-28
Pub. No.
US20030235985A1
Examiner
LE, DUNG ANH
Art Unit
2818
PTA
-37 days