Patent Assignment
Reel/Frame 016440/0307
Assignment of Assignor's Interest
Recorded: 2005-04-01
Pages: 3
Assignor
GAST, TRACEY A.
Executed: 2005-04-01
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318-3052
Covered Property
(1)
Methods for Rinsing Microelectronic Substrates Utilizing Cool Rinse Fluid Within a Gas Enviroment Including a Drying Enhancement Substance
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.