Granted Patent
Utility
US 6,251,195 · App. 09/351,939
Method for transferring a microelectronic device to and from a processing chamber
Inventors:
Thomas J. Wagener, John C. Patrin, William P. Inhofer, Kevin L. Siefering
Patented Case
View Patent ↗
Granted: Jun 26, 2001
Filed: Jul 12, 1999
Inventors
Thomas J. Wagener
John C. Patrin
William P. Inhofer
Kevin L. Siefering
Assignee (at issue)
FSI INTERNATIONAL, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.