Patent Assignment
Reel/Frame 015847/0336
Assignment of Assignor's Interest
Recorded: 2004-10-04
Pages: 4
Assignors
BENSON, ARNE C.
Executed: 2004-09-14
OLSON, ERIK D.
Executed: 2004-09-07
SPAETH, DOUGLAS S.
Executed: 2004-09-07
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318-3052
Covered Property
(1)
System and Method for Carrying Out Liquid and Subsequent Drying Treatments on One or More Wafers
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.