Patent Assignment
Reel/Frame 015983/0741
Assignment of Assignor's Interest
Recorded: 2004-11-15
Pages: 3
Assignor
WAGENER, THOMAS J.
Executed: 2004-10-26
Assignee
FSI INTERNATIONAL, INC.
3455 LYMAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Controlled Growth of Highly Uniform, Oxide Layers, Especially Ultrathin Layers
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.