Patent Assignment
Reel/Frame 012173/0573
Assignment of Assignor's Interest
Recorded: 2001-09-17
Pages: 10
Assignors
KUNKEL, PAM
Executed: 2001-07-06
NARAYANSWAMI, NATRAJ
Executed: 2001-07-03
PATRIN, JOHN C.
Executed: 2001-07-20
Assignee
FSI INTERNATIONAL, INC.
322 LAKE HAZELTINE DRIVE, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Nozzle Design for Generating Fluid Streams Useful in the Manufacture of Microelectronic Devices
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.