Patent Assignment
Reel/Frame 013720/0798
Assignment of Assignor's Interest
Recorded: 2003-01-29
Pages: 3
Assignors
KURODA, OSAMU
Executed: 2003-01-24
TANIYAMA, HIROKI
Executed: 2003-01-24
TOSHIMA, TAKAYUKI
Executed: 2003-01-27
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Processing Apparatus and Substrate Processing Method