Patent Assignment
Reel/Frame 013730/0324
Assignment of Assignor's Interest
Recorded: 2003-02-04
Pages: 3
Assignor
MITROVIC, ANDREJ S.
Executed: 2002-06-20
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Control Method for Segmented Electrode Apparatus and Method for Plasma Processing