Assignment of Assignor's Interest

Recorded: 2003-02-07 Received: 2003-02-13 Pages: 3

Assignor

TIMANS, PAUL JANIS

Executed: 2003-01-22

Assignee

MATTSON TECHNOLOGY, INC.

2800 BAYVIEW DRIVE, FREMONT, CA, 94538, UNITED STATES

Covered Property (1)

Apparatus and Method for Reducing Stray Light in Substrate Processing Chambers

Application: 10/288,271 →