IP Library › Granted Patent US 6,835,914
Granted Patent Utility
US 6,835,914 · Confirmation No. 7694

APPARATUS AND METHOD FOR REDUCING STRAY LIGHT IN SUBSTRATE PROCESSING CHAMBERS

Inventor: Paul Janis Timans
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2016-05-11 IMIS Miscellaneous Internal Document 2 View
2015-09-03 IMIS Miscellaneous Internal Document 1 View
2004-11-18 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-11-18 LET. Miscellaneous Incoming Letter 1 View
2004-11-18 DRW Drawings-only black and white line drawings 4 View
2004-08-11 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-11 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-11 1449 List of References cited by applicant and considered by examiner 8 View
2004-08-11 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-11 FWCLM Index of Claims 2 View
2004-08-11 SRFW Search information including classification, databases and other search related notes 2 View
2004-06-03 WFEE Fee Worksheet (SB06) 1 View
2004-04-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-04-29 ABST Abstract 1 View
2004-04-29 SPEC Specification 1 View
2004-04-29 CLM Claims 6 View
2004-04-29 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-04-01 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-02-17 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-02-17 FOR Foreign Reference 26 View
2004-02-09 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-02-09 FOR Foreign Reference 38 View
2004-02-09 FOR Foreign Reference 30 View
2004-01-29 CTNF Non-Final Rejection 5 View
2004-01-29 892 List of references cited by examiner 1 View
2004-01-29 1449 List of References cited by applicant and considered by examiner 2 View
2004-01-24 SRNT Examiner's search strategy and results 3 View
2003-03-04 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-02-07 PEFR Applicant Response to Pre-Exam Formalities Notice 4 View
2003-02-07 OATH Oath or Declaration filed 3 View
2002-12-20 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-11-05 TRNA Transmittal of New Application 2 View
2002-11-05 SPEC Specification 23 View
2002-11-05 CLM Claims 6 View
2002-11-05 ABST Abstract 1 View
2002-11-05 DRW Drawings-only black and white line drawings 4 View
2002-11-05 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-11-05 SRFW Search information including classification, databases and other search related notes 1 View
2002-11-05 FWCLM Index of Claims 1 View
2002-11-05 TRNA Transmittal of New Application 2 View
2002-11-05 DRW Drawings-only black and white line drawings 4 View
2002-11-05 SPEC Specification 23 View
2002-11-05 CLM Claims 6 View
2002-11-05 ABST Abstract 1 View
2002-11-05 WFEE Fee Worksheet (SB06) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,835,914
App. No.
10/288,271
Filed
2002-11-05
Granted
2004-12-28
Pub. No.
US20040084437A1
Art Unit
3742
PTA
-41 days