Assignment of Assignor's Interest

Recorded: 2003-02-10 Received: 2003-02-13 Pages: 2

Assignors

MOUKARA, MOLELA

Executed: 2001-10-26

LUDWIG, BURKHARD

Executed: 2001-10-29

Assignee

INFINEON TECHNOLOGIES AG

PATENTABTEILUNG, RIDLERSTRASSE 55, MUENCHEN, DEX, 80339, GERMANY

Covered Property (1)

Method for Detecting and Automatically Eliminating Phase Conflicts on Alternating Phase Masks

Application: 09/978,396 →