Granted Patent
Utility
US 6,543,045
· Confirmation No. 4244
METHOD FOR DETECTING AND AUTOMATICALLY ELIMINATING PHASE CONFLICTS ON ALTERNATING PHASE MASKS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-10-16 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-10-16 | SPEC |
Specification | 38 | View | |
| 2001-10-16 | CLM |
Claims | 6 | View | |
| 2001-10-16 | ABST |
Abstract | 1 | View | |
| 2001-10-16 | DRW |
Drawings-only black and white line drawings | 17 | View | |
| 2001-10-16 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Burkhard Ludwig
Munchen, GERMANY
Molela Moukara
Munchen, GERMANY
Attorneys & Agents of Record
Classification
USPC
716/21
Prosecution
- Examiner
- TAT, BINH C
- Art Unit
- 2825
- Docket No.
- L&L-I0011
- Confirmation No.
- 4244
Foreign Priority
100 51 134.1
·
2000-10-16
·
GERMANY
Publication
- Pub. No.
- US20020046392A1
- Pub. Date
- 2002-04-18
Patent Term Adjustment
-5days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-09
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-10
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Quick Facts
- Patent No.
- US 6,543,045
- App. No.
- 09/978,396
- Filed
- 2001-10-16
- Granted
- 2003-04-01
- Pub. No.
- US20020046392A1
- Examiner
- TAT, BINH C
- Art Unit
- 2825
- PTA
- -5 days
External Links