Patent Assignment
Reel/Frame 013751/0980
Assignment of Assignor's Interest
Recorded: 2003-02-13
Received: 2003-02-20
Pages: 3
Assignor
NEC CORPORATION
Executed: 2002-11-01
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA 211-8668, JPX, JAPAN
Covered Property
(1)
Apparatus for Cleaning Semiconductor Device
Application:
09/888,565 →