IP Library › Patent Application 09888565
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App. No. 09/888,565 · Confirmation No. 9888

APPARATUS FOR CLEANING SEMICONDUCTOR DEVICE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-08-01 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-08-01 LET. Miscellaneous Incoming Letter 1 View
2001-09-17 TRNA Transmittal of New Application 2 View
2001-09-17 ABST Abstract 1 View
2001-06-26 TRNA Transmittal of New Application 4 View
2001-06-26 ADS Application Data Sheet 2 View
2001-06-26 SPEC Specification 14 View
2001-06-26 CLM Claims 5 View
2001-06-26 DRW Drawings-only black and white line drawings 4 View
2001-06-26 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/888,565
Filed
2001-06-26
Granted
2004-04-27
Pub. No.
US20020023670A1
Examiner
PERT, EVAN T
Art Unit
2829
PTA
-120 days