Patent Assignment
Reel/Frame 013763/0391
Assignment of Assignor's Interest
Recorded: 2003-02-06
Pages: 17
Assignors
HOFFMAN, DANIEL
Executed: 2001-10-02
YE, YAN
Executed: 2001-10-22
KATA, DAN
Executed: 2001-10-09
BUCHBERGER, DOUGLAS A., JR.
Executed: 2001-08-03
ZHAO, XIAOYE
Executed: 2001-10-03
CHIANG, KANG-LIE
Executed: 2001-10-17
HAGEN, ROBERT B.
Executed: 2001-10-17
MILLER, MATTHEW L.
Executed: 2001-10-02
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, PATENT COUNSEL, M/S 2061, SANTA CLARA, CALIFORNIA, 95035
Covered Property
(1)
Merie Plasma Reactor with Overhead Rf Electrode Tuned to the Plasma with Arcing Suppression