Patent Assignment
Reel/Frame 013779/0162
Assignment of Assignor's Interest
Recorded: 2003-02-19
Pages: 4
Assignors
NIUYA, TAKAYUKI
Executed: 2002-12-25
ORII, TAKEHIKO
Executed: 2002-12-25
MORI, HIROYUKI
Executed: 2002-12-25
YANO, HIROSHI
Executed: 2002-12-25
NAKAMORI, MITSUNORI
Executed: 2002-12-25
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus