Patent Assignment
Reel/Frame 013788/0066
Assignment of Assignor's Interest
Recorded: 2003-02-24
Pages: 3
Assignors
YOSHITAKE, YASUHIRO
Executed: 2003-01-28
TAMAKI, KENJI
Executed: 2003-01-28
WATANABE, MASAHIRO
Executed: 2003-01-28
Assignee
HITACHI, LTD.
6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Its Apparatus for Manufacturing Simiconductor Device