Patent Assignment
Reel/Frame 013812/0793
To Correct Receiving Party Name
Recorded: 2003-03-10
Pages: 3
Assignor
FSI INTERNATIONAL
Executed: 2002-07-12
Assignee
FSI INTERNATIONAL, INC.
600 MILLENIUM DRIVE, ALLEN, TEXAS, 75013
Covered Property
(1)
Robotic System Control
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.