Patent Assignment
Reel/Frame 013816/0941
Assignment of Assignor's Interest
Recorded: 2003-02-25
Pages: 2
Assignor
KOSUGI, YUJI
Executed: 2003-02-18
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Surface Position Detection Apparatus and Method, and Exposure Apparatus and Device Manufacturing Method Using the Exposure Apparatus