Patent Assignment
Reel/Frame 013837/0297
Assignment of Assignor's Interest
Recorded: 2003-02-25
Pages: 3
Assignee
PALO ALTO RESEARCH CENTER INCORPORATED
3333 COYOTE HILL ROAD, PALO ALTO, CALIFORNIA, 94304
Covered Property
(1)
Methods to Make Bimorph Mems Devices