Patent Assignment
Reel/Frame 013854/0414
Assignment of Assignor's Interest
Recorded: 2003-03-07
Pages: 3
Assignors
UEDA, TETSUZO
Executed: 2003-03-05
NAKAYAMA, HISASHI
Executed: 2003-03-05
YURI, MASAAKI
Executed: 2003-03-05
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, OAZA KADOMA, KADOMA-SHI, OSAKA 571-8501, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Thin Film