Patent Assignment
Reel/Frame 013854/0576
Assignment of Assignor's Interest
Recorded: 2003-03-13
Pages: 2
Assignor
VAN DER VEEN, PAUL
Executed: 2003-03-06
Assignee
ASML NETHERLANDS B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, THE, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus, Device Manufacturing Method, Device Manufactured Thereby, and Computer Program