Patent Assignment
Reel/Frame 013856/0294
Assignment of Assignor's Interest
Recorded: 2003-03-05
Pages: 3
Assignors
MAO, AARON D.
Executed: 2003-02-15
ANTONIO, SAMUEL L.
Executed: 2003-02-14
HYARE, POM
Executed: 2003-02-14
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CONNECTICUT, 06810
Covered Property
(1)
Freewire System for Suppression of Particulate Deposition and Accumulation on Processing Chamber Walls
Application:
10/379,850 →
Publication:
US 2004/0175301
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.