Patent Assignment
Reel/Frame 013865/0220
Assignment of Assignor's Interest
Recorded: 2003-06-18
Pages: 4
Assignors
CHOU, ANTHONY I
Executed: 2003-06-09
CHUDZIK, MICHAEL P
Executed: 2003-06-12
FURUKAWA, TOSHIHARU
Executed: 2003-06-17
GLUSCHENKOV, OLEG
Executed: 2003-06-11
KIRSCH, PAUL D
Executed: 2003-06-17
SCHEER, KRISTEN C
Executed: 2003-06-13
SHEPARD, JOSEPH
Executed: 2003-06-17
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Method for Forming a Uniform Distribution of Nitrogen in Silicon Oxynitride Gate Dielectric