Patent Assignment
Reel/Frame 013865/0906
Assignment of Assignor's Interest
Recorded: 2003-03-13
Pages: 3
Assignee
MITSUBISHI DENKI KABUSHIKI KAISHA
2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO, 100-8310, JAPAN
Covered Property
(1)
Device Inspecting for Defect on Semiconductor Wafer Surface
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.