Patent Assignment
Reel/Frame 013891/0013
Assignment of Assignor's Interest
Recorded: 2003-03-19
Pages: 3
Assignor
NAKAMURA, OSAMU
Executed: 2003-03-13
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Plasma Producing Apparatus and Doping Apparatus