Patent Assignment
Reel/Frame 013898/0661
Assignment of Assignor's Interest
Recorded: 2003-03-20
Pages: 3
Assignors
TASHIRO, MAKOTO
Executed: 2003-03-10
KONDOH, KEISUKE
Executed: 2003-03-10
SAEKI, HIROAKI
Executed: 2003-03-10
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Positioning Substrate for Semiconductor Process