Patent Assignment
Reel/Frame 013903/0647
Assignment of Assignor's Interest
Recorded: 2003-03-19
Pages: 4
Assignor
YANG, BAORUI
Executed: 2003-03-14
Assignee
MICRON TECHNOLOGY, INC.
8000 S. FEDERAL WAY, BOISE, IDAHO, 83706-9632
Covered Property
(1)
Method to Recover the Exposure Sensitivity of Chemically Amplified Resins from Post Coat Delay Effect