Patent Assignment
Reel/Frame 013905/0670
Assignment of Assignor's Interest
Recorded: 2003-03-25
Pages: 3
Assignor
ITANI, TAKAHARU
Executed: 2003-03-18
Assignee
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Apparatus and Method for Manufacturing Semiconductor Devices, and Semiconductor Device