Patent Assignment
Reel/Frame 013914/0537
Assignment of Assignor's Interest
Recorded: 2003-04-01
Pages: 3
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Method for Correcting Oscillation-Induced Imaging Errors in an Objective
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.