Patent Assignment
Reel/Frame 013917/0489
Assignment of Assignor's Interest
Recorded: 2003-03-28
Pages: 3
Assignors
CHOU, CHUN-LI
Executed: 2002-11-08
TAO, HUN-JAN
Executed: 2002-11-08
HSU, PENG-FU
Executed: 2002-11-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 121 PARK AVENUE 3, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, R.O.C., TAIWAN
Covered Property
(1)
Wet Cleaning Cavitation System and Method to Remove Particulate Wafer Contamination