Patent Assignment
Reel/Frame 013917/0499
Assignment of Assignor's Interest
Recorded: 2003-04-03
Pages: 2
Assignors
OTSUKI, HAYASHI
Executed: 2003-03-20
MATSUDA, TSUKASA
Executed: 2003-03-20
IKEDA, KYOKO
Executed: 2003-03-20
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Particle-Measuring System and Particle-Measuring Method