Patent Assignment
Reel/Frame 013921/0493
Assignment of Assignor's Interest
Recorded: 2003-04-04
Pages: 3
Assignors
NAKASUJI, MAMORU
Executed: 2003-03-10
KATO, TAKAO
Executed: 2003-03-10
SATAKE, TOHRU
Executed: 2003-03-10
WATANABE, KENJI
Executed: 2003-03-10
MURAKAMI, TAKESHI
Executed: 2003-03-10
NOJI, NOBUHARU
Executed: 2003-03-10
Assignee
EBARA CORPORATION
11-1 HANEDA ASAHI-CHO,, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Electron Beam System and Method of Manufacturing Devices Using the System