Patent Assignment
Reel/Frame 013923/0164
Assignment of Assignor's Interest
Recorded: 2003-04-07
Pages: 7
Assignors
WANG, SHULIN
Executed: 2003-02-03
SANCHEZ, ERROL ANTONIO C.
Executed: 2003-01-29
CHEN, AIHUA
Executed: 2003-02-03
Assignee
APPLIED MATERIALS, INC
P.O. BOX 450-A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method for Forming a High Quality Low Temperature Silicon Nitride Film