Patent Assignment
Reel/Frame 013931/0807
Assignment of Assignor's Interest
Recorded: 2003-03-28
Received: 2003-04-11
Pages: 2
Assignee
MOSEL VITELIC, INC.
NO. 19 LI HSIN ROAD, SCIENCE BASED INDUSTRIAL PARK, HSIN CHU CITY, TWX, TAIWAN
Covered Property
(1)
Method for etching a titanium-containing layer prior to etching an aluminum layer in a metal stack
Application:
10/402,745 →