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App. No. 10/402,745 · Confirmation No. 4008

Method for etching a titanium-containing layer prior to etching an aluminum layer in a metal stack

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2007-12-06 ABN Abandonment 2 View
2007-03-16 CTFR Final Rejection 24 View
2007-03-16 892 List of references cited by examiner 1 View
2007-03-16 FWCLM Index of Claims 1 View
2007-03-16 BIB Bibliographic Data Sheet 1 View
2007-03-16 SRFW Search information including classification, databases and other search related notes 1 View
2007-02-13 SRNT Examiner's search strategy and results 2 View
2006-12-06 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2006-12-06 CLM Claims 9 View
2006-12-06 REM Applicant Arguments/Remarks Made in an Amendment 15 View
2006-12-06 WFEE Fee Worksheet (SB06) 1 View
2006-09-07 CTNF Non-Final Rejection 21 View
2006-09-07 892 List of references cited by examiner 1 View
2006-09-07 FOR Foreign Reference 2 View
2006-09-07 BIB Bibliographic Data Sheet 1 View
2006-09-07 FWCLM Index of Claims 1 View
2006-09-07 SRFW Search information including classification, databases and other search related notes 1 View
2006-08-25 SRNT Examiner's search strategy and results 2 View
2006-06-22 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2006-06-22 CLM Claims 8 View
2006-06-22 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2006-06-22 AF/D Affidavit-submitted prior to Mar 15, 2013 13 View
2006-06-22 RCEX Request for Continued Examination (RCE) 1 View
2006-06-22 LET. Miscellaneous Incoming Letter 1 View
2006-06-22 XT/ Extension of Time 1 View
2006-06-22 WFEE Fee Worksheet (SB06) 1 View
2006-05-02 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2006-01-27 CTFR Final Rejection 20 View
2006-01-27 SRFW Search information including classification, databases and other search related notes 1 View
2006-01-17 SRNT Examiner's search strategy and results 1 View
2005-11-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2005-11-28 CLM Claims 7 View
2005-11-28 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2005-11-28 WFEE Fee Worksheet (SB06) 1 View
2005-08-24 CTNF Non-Final Rejection 15 View
2005-08-24 892 List of references cited by examiner 1 View
2005-08-24 SRFW Search information including classification, databases and other search related notes 1 View
2005-08-09 SRNT Examiner's search strategy and results 4 View
2005-06-22 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2005-06-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-06-22 CLM Claims 5 View
2005-06-22 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2005-06-22 AF/D Affidavit-submitted prior to Mar 15, 2013 3 View
2005-06-22 LET. Miscellaneous Incoming Letter 1 View
2005-06-22 WFEE Fee Worksheet (SB06) 1 View
2005-03-22 CTNF Non-Final Rejection 12 View
2005-03-22 892 List of references cited by examiner 1 View
2005-01-31 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2005-01-31 CLM Claims 4 View
2005-01-31 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2005-01-31 LET. Miscellaneous Incoming Letter 1 View
2005-01-31 DRW Drawings-only black and white line drawings 1 View
2005-01-31 WFEE Fee Worksheet (SB06) 1 View
2004-12-01 CTNF Non-Final Rejection 8 View
2004-12-01 1449 List of References cited by applicant and considered by examiner 2 View
2004-12-01 892 List of references cited by examiner 1 View
2004-12-01 SRFW Search information including classification, databases and other search related notes 1 View
2004-12-01 BIB Bibliographic Data Sheet 1 View
2004-11-24 SRNT Examiner's search strategy and results 2 View
2004-10-27 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2004-10-04 PA.. Power of Attorney 5 View
2004-06-30 LET. Miscellaneous Incoming Letter 1 View
2003-09-03 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-03-28 TRNA Transmittal of New Application 2 View
2003-03-28 ADS Application Data Sheet 2 View
2003-03-28 SPEC Specification 8 View
2003-03-28 CLM Claims 2 View
2003-03-28 ABST Abstract 1 View
2003-03-28 DRW Drawings-only black and white line drawings 1 View
2003-03-28 OATH Oath or Declaration filed 3 View
2003-03-28 IMIS Miscellaneous Internal Document 1 View
2003-03-28 136A Authorization for Extension of Time all replies 2 View
2003-03-28 WFEE Fee Worksheet (SB06) 1 View
2003-03-28 WFEE Fee Worksheet (SB06) 1 View
2003-03-28 WCLM Claims Worksheet (PTO-2022) 1 View
2003-03-28 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
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Quick Facts
App. No.
10/402,745
Filed
2003-03-28
Pub. No.
US20040192059A1
Art Unit
1792