Assignment of Assignor's Interest

Recorded: 2003-04-21 Received: 2003-04-23 Pages: 3

Assignors

GANS, FRITZ

Executed: 2002-02-21

PFORR, RAINER

Executed: 2002-02-21

Assignee

INFINEON TECHNOLOGIES AG

RIDLERSTRASSE 55, PATENTABTEILUNG, MUENCHEN, DEX, 80339, GERMANY

Covered Property (1)

Method of Transferring a Pattern of High Structure Density by Multiple Exposure of Less Dense Partial Patterns

Application: 10/073,846 →